{"id":1342,"date":"2022-07-21T17:49:21","date_gmt":"2022-07-21T09:49:21","guid":{"rendered":"https:\/\/www.crtsa.tw\/?p=1342"},"modified":"2022-08-29T21:29:40","modified_gmt":"2022-08-29T13:29:40","slug":"improving-liquid-film-thickness-uniformity-of-semiconductor-etching-equipment-using-flow-field-visualization-and-cfd-simulation","status":"publish","type":"post","link":"https:\/\/www.crtsa.tw\/?p=1342","title":{"rendered":"\u8cf4\u97cb\u8c6a\u78a9\u58eb\u5b78\u4f4d\u8ad6\u6587\u7372\u9078\u5de5\u7a0b\u8ad6\u6587\u734e"},"content":{"rendered":"\n<p>\u8cc0\u672c\u7814\u7a76\u5ba4<\/p>\n\n\n\n<p><strong>\u8cf4\u97cb\u8c6a \u78a9\u58eb\u8ad6\u6587<\/strong>\uff1a<\/p>\n\n\n\n<p><strong>\u61c9\u7528\u6d41\u5834\u53ef\u8996\u5316\u8207\u8a08\u7b97\u6d41\u9ad4\u529b\u5b78\u6539\u5584\u534a\u5c0e\u9ad4\u8755\u523b\u8a2d\u5099\u6db2\u819c\u5747\u52fb\u5ea6\u4e4b\u7814\u7a76\uff08\u767c\u8868\u65bc<\/strong><br>IIEEE&nbsp;Transactions on Semiconductor Manufacturing&nbsp;. &nbsp;\u984c\u76ee\uff1a&nbsp;Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation\uff09<\/p>\n\n\n\n<p>\u69ae\u7372\u3010\u53f0\u7063\u51b7\u51cd\u7a7a\u8abf\u5b78\u6703\u3011&#8211;2021\u5e74\u5de5\u7a0b\u8ad6\u6587\u734e\u7372\u512a\u52dd\u734e\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u8cc0\u672c\u7814\u7a76\u5ba4 \u8cf4\u97cb\u8c6a \u78a9\u58eb\u8ad6\u6587\uff1a \u61c9\u7528\u6d41\u5834\u53ef\u8996\u5316\u8207\u8a08\u7b97\u6d41\u9ad4\u529b\u5b78\u6539\u5584\u534a\u5c0e\u9ad4\u8755\u523b\u8a2d\u5099\u6db2 &hellip; <a href=\"https:\/\/www.crtsa.tw\/?p=1342\">\u95b1\u8b80\u5168\u6587 <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[],"class_list":["post-1342","post","type-post","status-publish","format-standard","hentry","category-news"],"_links":{"self":[{"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=\/wp\/v2\/posts\/1342","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1342"}],"version-history":[{"count":1,"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=\/wp\/v2\/posts\/1342\/revisions"}],"predecessor-version":[{"id":1343,"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=\/wp\/v2\/posts\/1342\/revisions\/1343"}],"wp:attachment":[{"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1342"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1342"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.crtsa.tw\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1342"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}